CV: Experimental Waferstepper

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Company	Philips Research Laboratories, Eindhoven, The Netherlands
Product	Design, implementation, maintenance and documentation of software for controlling a wafer stepper
Period	July 1994 - July 1995
Function	System engineer (TO)

At Philips Research Laboratories, research is done for new products and production methods.

For ASM Lithography special wafer steppers are built here for measurements and experiments.

The experimental set-ups are controlled by a VME bus system with VxWorks Operating system. Some DSP cards accomplish the link between VxWorks and the hardware in the VME-bus system. The user interface worked on a graphical workstation that communicated wi th the VME rack through remote procedure calls

Role:

• estimating and planning my own activities;
• writing technical design documentation, manuals and reports (in English);
• functioning as a medium between specialists and users
• design, implementation en maintenance of software in C and MatLab for: - Controlling the prototype by remote procedure calls from several different platforms (GUI, MatLab, BASIC, Unix); - Experiments with advanced control strategies;
• doing measurements on the prototype and processing the measurement data for presentation;

Equipment	X-Terminal, 86486-PC, VME-bus systems, TMS320C51 DSP
Programming language	C, BASIC, MatLab
Operating system	HP-UX, VxWorks, MS-DOS, MS-Windows
Tools	X-Designer
	HP-UX en GNU C-compiler en linker
	WordPerfect 5.1, FrameMaker

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