CV: Product Development Waferstepper

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Company	Philips Centre for Manufacturing Technology, Eindhoven, The Netherlands
Product	Design, implementation, maintenance and documentation of software for controlling a wafer stepper
Period	July 1995 - June 1996
Function	System Engineer (STO)

At Philips CMT new production methods are made ready for practical use.

A prototype of a wafer stepper is built here for ASM Lithography. This prototype was controlled by a VME bus system with VxWorks Operating system. Some DSP cards drive the hardware. The user interface worked on a graphical workstation that communicated wi th the VME rack through remote procedure calls

Role:

• estimating and planning my own activities;
• design, implementation and maintenance of software in C and MatLab for: - Controlling the prototype by remote procedure calls from several different platforms (GUI, MatLab, Unix); - Synchronisation between two prototypes; - Experiments with advanced control strategies;
• doing measurements on the prototype and processing the measurement data for presentation;
• operating the machine for exposing wafers and during demonstrations;
• functioning as a medium between specialists and users
• setting up the software development project for the next generation of prototypes.

Equipment	SUN-workstation, 486-PC, VME-bus systems, DSP (TMS320C51)
Programming Language	C, MatLab
Operating system	Sun-OS, VxWorks, MS-DOS, MS-Windows
Tools	GNU C-compiler and linker
	Sun C-compiler and linker
	Texas Instruments compiler and linker for the TMS320C51

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